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| 论文题目: | research on frequency bandwidth and phase difference of piezoelectric resonant cantilever based on mass |
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| 作者: | min liu，hui xia1，dong xia，guoqiang liu1 |
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| 刊物名称: | microsystem technologies |
| 年: | 2021 |
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research on frequency bandwidth and phase difference of piezoelectric resonant cantilever based on mass